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Interruttori a distanza
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Ultra Start 1600M Manuale Utente Pagina 118
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Indice
RISOLUZIONE PROBLEMI
SEGNALIBRI
Valutato
.
/ 5. Basato su
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G 10
Pumping cur
ves
Alcatel V
acuum T
echnology France - User’
s Manual A
TH 1300 M/MT - A
TH 1600 M/MT
GB 00760 - Edition 02 - September 99
2/2
Inlet pressure (Pa)
Inlet pressure (mbar)
Flow rate
(sccm)
1
10
100
1000
10
000
10
-3
10
-4
10
-2
1
10
-1
10
1
10
-
1
10
-
2
11
0
1
10
3
10
2
F
l
ow rate versus in
l
et pressure
Gas : N
2
Upper limits
for continuous operation
ATH 1300 M, DN 200
ATH 1600 M, DN 200
1
2
...
113
114
115
116
117
118
119
120
121
122
ATH 1300/1600 M-MT
1
GB 00779 – Ed 02 - March 04
2
MANUAL REFERENCE: 105 677
3
: 12 - JANUARY 2004
3
ATH 1300 M/MT - ATH 1600 M/MT
4
Contents
5
Introduction to
7
5 actives axis
10
The pump operating principle
11
The hybrid-turbo pump
12
Pump overview
13
Compact and functional
15
PUMP CABLE
16
DRY CONTACTS
16
The accessories
17
The performances
19
CG Centre de gravité
20
The technical characteristics
21
Unpacking and storage
33
Equipment
35
Loads transmitted to the
37
Inlet flange installation
38
● the flange dimensions
39
Inlet and exhaust connections
41
Secondary isolation valve
42
At exhaust:
43
Air inlet valve connection
45
(option)
45
Electrical connection
46
Protective earthing
46
Characteristics
47
Purge connection
47
CAUTION!
49
Water cooling connection
51
WAR NING
53
Heating band connection
54
Dry contacts
54
Typical connection
61
Signaling using outputs
63
The control by voltage
65
The control by dry
65
“input control” mode
65
The output dry contacts
67
“Rem.“ connector at
69
Analog output signal
69
ACT 1300 M
71
Rem. connector wiring:
72
Multiple RS485 serial link:
72
Detailed description
73
STARTing
83
WAITING HEAT
83
OK FOR PROCESS
83
Controller start-up
84
DISPLAY
85
(see B 100)
85
RS 232 RS 485
87
Serial link setting
87
(continued)
87
Controlling the pump
89
KEYB XX H
91
ACT XXXXX V3.XX
91
ATH XXXXXX
91
READY TO START!
91
Pumping stop
92
Immediate restarts
93
Event of a power cut
93
REM XX H
94
D 06 : EXT.SAFETY
95
«INH» Inhibit mode operation
97
INH. BRK. XX H
97
Safety instructions
100
Diagnosis and troubleshooting
101
■ The signal light not on
102
PUMP-TEMP1
104
Shipping procedure
109
Replacement of parts
113
First level maintenance parts
115
Pumping curves
117
● Attention!
119
QUESTIONNAIRE DE SECURITE
120
SAFETY QUESTIONNAIRE
120
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