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Contents

Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT

User’s Manual

ATH 1300 M/MT - 1600 M/MT

GB 00721 - Edition 12 - January 04

1/2

Introduction

Start-up

■

Introduction to the ATH 1300 M/MT -

1600 M/MT and associated ACT controller . . .

■ The pump operating principle . . . . . . . . . . . .

■ Pump overview . . . . . . . . . . . . . . . . . . . . .

■ ACT 1300 M controller. . . . . . . . . . . . . . . . .

■ The accessories . . . . . . . . . . . . . . . . . . . . .

■ The technical characteristics . . . . . . . . . . . . .

■ Certificate of compliance SEMI S2-93 A . . . . .

■ Safety instructions . . . . . . . . . . . . . . . . . . . .

■ Unpacking and storage . . . . . . . . . . . . . . . .

■ Pump connections to an installation . . . . . . . .

■ Inlet and exhaust connections . . . . . . . . . . . .

■

Air inlet valve connection (option)

. . . . . . . . . . .

■ Nitrogen purge device connection . . . . . . . . .

■ Water cooling connection . . . . . . . . . . . . . . .

■ Heating band connection . . . . . . . . . . . . . . .

■ Electrical connections . . . . . . . . . . . . . . . . . .

■ «Dry contacts» connector wiring . . . . . . . . . .

■ «Inputs/Outputs» connector wiring . . . . . . . . .

■ «Rem.» connector wiring . . . . . . . . . . . . . . .

■ RS 232 or RS 485 serial link wiring . . . . . . . .

■ Detailed description of RS commands . . . . . . .

■ A 10

■ A 20

■ A 30

■ A 40

■ A 50

■ A 60

■ A 70

■ B 10

■ B 20

■ B 30

■ B 31

■ B 40

■ B 50

■ B 60

■ B 70

■ B 80

■ B 90

■ B 91

■ B 100

■ B 110

■ B120

1 2 3 4 5 6 7 8 9 10 ... 121 122

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Ultra Start 1600M Manuale Utente Pagina 5

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